Research Of Multi-chip ID-Blade Slicer

According to the growing actual needs of people on the semiconductor materials' processing,machining quality and efficiency.This paper presents the concept of multi-chip inner-diameter blade slicer,and carried out related research and development work.Firstly,the composition and layout of multi-chip inner-diameter blade slicer were confirmed by research of the processing technology of inner-diameter blade slicer,aimed at the deficiencies such as low automation and cutting efficiency,large labor resource consumption and so on.Based on the box- vertical structure,we had detailed design and research on supporting system, spindle-cutting system and feed system.Secondly,we had used ANSYS to do the modal analysis and static analysis of the spindle and blade tension system. Through analyse the simulation results, we had calculated the related stiffness of the spindle and the critical speed, and determined the appropriate spindle unit of the multi-chip inner-diameter blade slicer. We had summed up the influence curve of the effect of blade tension with changes of the preload, the friction coefficient and shape of contact surfaces,and determined the variation range of every factor to obtain good blade-tension effect.Finally, we had an improvement for the lathebed in order to optimize the machining accuracy and prolongate the service life of the lifting plate and rail. We had a finite element simulation of the new and old lathebed, through comparing the results,we verified the new bed system was reasonable and had a higher cutting accuracy and stability.Round of multi-chip through the slicing machine to monitor the actual working condition, we know that effectively improve the cutting efficiency and cutting precision of research results with good economic and social benefits.By monitoring and evaluating the working condition of the multi-chip inner-diameter blade slicer, we know that this design effectively improved the cutting efficiency and cutting precision,and the research achievement have good economic and social benefits.