The Simulation Of Energy Distribution Of Ions At Electrode And Collision Rate Of Electron

In capacitive coupling rf glow discharge of nitrogen ,energy and angle distribution of ions at electrode is numerically simulated by using the of PIC– MCC method. At the same time, we simulated the dissociation rate,ionization rate, excitation rate and dissociative ionization rate of electron at all the discharge room. Through the process of simulation, we not only considered the all kinds of collides of electron and nitrogen,but also ions and nitron. Since the value of section of all kinds of collides has big diffrence, we only considerd the elastic collisions and charge exchange collisions of ions and nitrogen. Ignoring the collisions of electronic and ion . Specific work shown below:1 Established the PIC-MCC hybrid model of the nitrogen rf plasma discharge, in the field of charged particle movement and the self-consistent way by the PIC, the process of collision between particles by MCC method. using Fortran language, a model of combining the PIC-MCC was writed, to simulate the process of nitrogen rf discharge.2 The calculation of nitrogen rf plasma energy and angle distribution of ions at the electrode and its distribution with discharge pressure and voltage amplitude variation.3 Calculating the nitrogen rf plasma discharge in the space of dissociation rate, electronic, ionization rates and the distribution of dissociation rate, also simulated with the discharge pressure and the changes of the voltage amplitude.4 In order to ensure the accuracy of the procedure, the nitrogen electronic energy distribution of experimental results were compared, and the results were good.Anyhow, nitrogen rf glow discharge, is a complex process of discharge at various discharge conditions. Study these discharge conditions of the inner link between the material of nitrogen, and the synthesis material surface has great significance nitriding process. This work for nitrogen rf plasma discharge provides a theoretical reference.