Numerical Simulation Of Atmospheric Plasma RF Glow Discharge

Glow discharge, especially at an atmospheric pressure RF glow discharge is one of very highlight research topics in gas discharge. As a major way to produce plasma, the atmospheric pressure RF glow discharge were studied at various aspects, and expanded to be widely used in thin film deposition, surface modification and so on.In this thesis, the atmospheric pressure RF capacitively coupled plasma is simulated by one-dimensional fluid model. We investigated the evolvement process of electron, ion and electric field produced by discharge majorly in O2 and N2 with time and space without considering the secondary electron emission, and discharging only in a mode. For the discharge in O2,27 reactions and 8 kinds of primary particles were considered, whereas for the discharge in N2,7 reactions and 3 kinds of primary particles were taken in. The characteristics of particle density and electric field with time and space are analyzed in detail.Moreover, the atmospheric discharge of O2 and N2 are simulate in ball coordinates. Simulation results show that it is a typical negatively charged plasma near the ground.