Numerical Study On Electron Cyclotron Resonance Plasma

Electron Cyclotron Resonance (ECR) is one of the several plasma-generation techniques that are being developed to meet the increasing stringent requirements in microelectronics fabrication. ECR sources operate at low pressure(<10mTorr) to improve uniformity and reduce contamination, and high plasma density to deliver a high flux of ions to the wafer surface, thereby maintaining a high throughput. All of those renders ECR plasma very attractive for application in both etching with high rates and thin film deposition with low surface damage.This paper is using a two-dimensional fluid model to study the device of microwave electron cyclotron resonance plasma in State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams of Dalian University of Technology . Using the theory of electronical dynamics, the mathematical model of the magnetic field produced by the magnetic field coils is established; using the theory of magnetohydrodynamics in plasma, the mathematical model of microwave electron cyclotron resonance plasma is established. In the models, we use axisymmetric assumption based on the device. Using 3-dimensional Simpson's Rule, the magnetic fields and the resonance area are computed numerically. The effects of the currents in the coils on the magnetic field and the resonance area are analyzed. Using finite difference method, the initial-boundary problem of differential equations satisfied by the plasmas is solved numerically. The effects of the pressure and microwave power on the evolution and distribution in space of the plasma species.In the first chapter, introductions of microwave electron cyclotron resonance plasma are introduced. In the second chapter, the simulation model, basic equations, normalized parameter, initial conditions and boundary conditions are presented. In the third chapter, simulation results of magnetic field are shown. In the fourth chapter, the simulation results are presented including variation of electron density with time, the electron density and electron temperature, variation of radial distribution of electron density with microwave power and pressure, Finally, conclusions and the future work are given in the last chapter.