Numerical Simulation Research On Electron Cyclotron Resonance Plasma

Recently,discharge of microwave electron cyclotron resonance plasma becomes an important aspect in plasma research and application at low pressure and low temperature.The microwave electron resonance plasma can discharge without electrgde,and generate uniform plasma with good characters such as high density,high ionization rate and huge bulk at low pressure,so it becomes an attractive research area in plasma physics.This paper is as the device of microwave electron resonance Plasma in State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams of Dalian University of Technology as the background.Using the theory of electron dynamics,the mathematical model of the magnetic field produced by the magnetic field coils is established;using the theory of magnetohydrodynamics in plasma,the mathematical model of microwave electron cyclotron resonance plasma is established.In the models,we use axisymmetric assumption based on the device.Using 3-dimensional Simpson's Rule,the magnetic fields and the resonance area are computed numerically.Using finite volume method,the initial-boundary problem of differential equations satisfied by the plasmas is solved numerically.The effects of the pressure and microwave power on the evolution and distribution in space of the plasma species.In the first chapter,a brief introduction of the concept of plasma,the technique and application of ECR plasma as well as the models of plasma discharge at low pressure and 10w temperature is introduced.In the second chapter,the simulation model including the magnetic model and the plasma model,simplification of the equations,the initial conditions and boundary conditions are presented.In the third chapter,the introduction of mathematical methods are presented,including the 3-D optimized Simpson's Rule for numerical integral,the finite volume method for differential equations and the banded Gauss elimination for the large sparse linear systems.In the forth chapter,the simulation results and discussion are presented.Finally,conclusions are given in the last chapter.