The Process Of Xel Excimer Formation In Discharge Plasma

The formation of XeI excimer in DC glow discharge plasma and DBD plasma of Xe/I2 mixture at low pressure(O.5-OTorr) is investigated. The formation mechanism of XeI excimer and influence of the varied piessure in the two plasmas are obtained through measuring the fluorescence emission spectra and the electron temperature. The results indicate that XeJ(B) excimer is the main product in the plasmas, then transits to the ground state, namely 131/2 X112, which is attributed to Bound?-Free transition, and emits 253nm fluorescence whose intensity has undulatory structure at the same time. For DC glow discharge plasma, Xe*+I2~~~~XeI*+I is major reaction producing the excimer whose efficiency reaches maximum at 2.5 Torr; and for DBD plasma, ~ is major reaction producing the excimer whose efficiency reaches maximum at 4 Ton.