Preparation Of OBN Films And Surface Modification Of Biological Inoculation Wire Using BN Coatings

Boron Nitride (BN) is aⅢ～Ⅴmultifunctional semiconductor material, which is widely used in machines, thermal, electronic, optical, radiation resistance and high-frequency electronic devices. The cubic Boron Nitride (cBN) films have been focused for its excellent physical and chemical properties. However, there is a larger dispute of the nucleation and growth mechanism. Orthorhombic Boron Nitride (oBN), which is a metastable phase of BN, can be translated to cBN. But there are few reports on the nature of its structure, growth mechanism and properities. In this paper, oBN films on silicon substrates have successfully been prepared by RF magnetron sputtering method and then annealed under high temperature. The result is that most of oBN is gradually transforming to cBN phase. In addition, the BN thin films have been coated on the biological inoculation wire surface. The life and efficiency of the inoculation wires are effectively improved by this composed materials.The main research content and innovative results obtained are shown as follows:1. The depositing condition of BN films on the silicon (100) substrates, including deposition time, substrate temperature and RF power, have been systematiclly studied. The results shown that depositing time and RF power play an key role in the deposition films of oBN phase. The oBN phase content increases with the deposition time and the RF power increasing.2. oBN phase films have been deposited on the silicon (100) substrates with the deposition rate 10 nm / min. The thickness of oBN film is about 900 nm. During the oBN film annealing process, oBN phase translates to cBN phase when the temperature is above 800°C. The crystal quality of cBN increase with the temperature increasing and the cBN phase content increases to 65% at annealing temperature 900°C. 3. The BN thin film has sucessfully coated on the surface of the biological inoculation wire, it is demonstrated that the BN coating has a mixed-phase structure by FTIR spectrum. This BN coating can effectively improve the effeciency and prolong the life time of the biological inoculation wire.