Growth of III-V nitride materials by MOCVD for device applications (Crystal growth)

This dissertation describes an investigation of the growth of gallium nitride (GaN) and aluminum gallium nitride (Al_xGa_1−x N) semiconductor materials by metalorganic chemical vapor deposition (MOCVD) for heterojunction field-effect transistor (HFET) and photodetector device applications. In Chapter I, the III-V nitride material system is discussed, and the current status of growth and device research in this material system is reviewed. Chapter 2 presents a detailed discussion of two important tensor properties of the wurtzite III-V nitrides: elasticity and piezoelectricity. In this discussion, a series of equations are developed that are used throughout this work to calculate properties such as strain, composition, and piezoelectric charge. In Chapter 3, the characterization techniques used to gather data for this dissertation are described. Particular attention is given to x-ray diffraction because of the usefulness and versatility of this technique. Chapter 4 is a description of the MOCVD reactor used to grow all of the films in this work. Chapter 5 presents a complete discussion of the growth and doping of GaN epitaxial layers. This chapter is divided into five sections: buffer layer optimization, GaN:ud growth, GaN:Si growth, Si-implantation of GaN, and GaN:Mg growth. In Chapter 6, the focus shifts to AlGaN epitaxial growth. The first part of the chapter is devoted to the growth and doping of AlGaN layers, while the second part deals with the characteristics of AlGaN/GaN heterostructures. Chapter 7 displays some of the device data from HFETs and photodetectors fabricated from the material described in Chapter 5 and Chapter 6. Finally, this dissertation concludes with Chapter 8, a summary of results and a discussion of potential research for the future.