| The research objective of this dissertation is to design, implement, and characterize innovative magnetic microstructures, microinductors and magnetic sensors using a new UV-LIGA (UV-based, Lithography and Galvanoforming)-based magnetic MEMS (Micro-Electro-Mechanical Systems) technology.; Using a microinductor as a foundry magnetic component, the large demand for the realization of magnetic-based microsystems such as electrical signal conversion systems, microfluidic systems, magnetic field sensing systems, and on-chip DC/DC power converters, can be satisfied. The realization of efficient, 3-dimensional microinductors on a chip as confined magnetic flux generators has been considered essential and difficult task to be performed prior to the realization of a CMOS/MEMS integrated system. In order to achieve the objectives of this research, a new multi-layer thick photoresist process, called UV-LIGA, has been developed and characterized. The UV-LIGA process has shown excellent structural reliability, electrical properties, and planarization characteristics, which are essential in realizing a multileveled magnetic microstructure. With the developed UV-LIGA technology, new magnetic MEMS-based microstructures and components such as thick electroplated permanent magnetic arrays, microinductors, microtransformers, electromagnetic microactuators and on-chip magnetic fluxgate sensors, have been designed, fabricated, and characterized in this research.; The microinductors and transformers developed in this research have shown low resistance, high inductance, and a high Q factor, which makes these magnetic components essential for the realization of microsensors, microactuators, and power converters. The first electroplated permanent magnet arrays have high magnetic energy density, which is comparable to a conventional permanent magnet, showing high potential for bi-directional microactuator applications. Finally, the on-chip fabricated magnetic fluxgate sensor has achieved a high sensitivity of 8400 V/T, which should initiate numerous applications for on-chip magnetic fluxgate magnetic sensors with high sensitivity.; In this research, an innovative UV-LIGA technology using thick photoresist has been developed and characterized and also successfully applied to new magnetic MEMS components such as electroplated permanent magnet arrays, microinductors, microtransformers, electromagnetic microactuators and on-chip magnetic fluxgate sensors. The innovative micromachining processes and devices developed during this research should have a strong impact in realizing numerous magnetic microsystems in the future. |
