High resolution x-ray diffraction of high quality 2 micron quaternary indium gallium arsenide antimonide digital alloy heterostructures grown by modulated molecular beam epitaxy

Growth of high quality mixed anion alloys such as InGaAsSb and AlGaAsSb are critical to laser heterostructures designed for 2--4 micron emission. However, run-to-run reproducibility as well as the ability to reproducibly change alloy compositions within a heterostructure tend to be poor. This is because the competition for incorporation between the two anions (As and Sb) is extremely sensitive to a large number of growth parameters such as temperature, incident fluxes, and growth rate, which may drift during the course of deposition, or are difficult to reset during growth.; With the intent of improving reproducibility, we have grown and characterized InGaAsSb and AlGaAsSb "digital alloys" deposited using modulated incident As2 and Sb2 incident fluxes. In0.1Ga 0.9AsySb1-y alloy layers were grown by alternately exposing the film surface to As2 and Sb2 fluxes with a periodicity ranging from ∼9 to ∼22 A. Average alloy composition is determined by the duty-cycle of the anion-oven shutters. Structural characterization using high-resolution x-ray diffraction (HRXRD) shows clear satellite peaks indicating that the digital alloys retain the compositional modulation. Optical characterization using photoluminescence indicate that the digital alloys can successfully replace the conventionally grown quaternary alloys with the same average composition. In addition we have characterized digitally grown InGaAsSb layers using HRXRD and measured the sensitivity of the resulting average composition to the growth temperature. We find that the composition of In0.1Ga0.9AsySb1-y alloy layers grown digitally on GaSb substrates is nearly three times less sensitive to the growth temperature as conventional growth.; Digital growth of InGaAsSb and AlGaAsSb layers has enabled the growth of heterostructures containing multiple alloy compositions by toggling between shutter duty-cycles during growth, without necessitating changes to the oven temperatures throughout deposition. We have grown and characterized optically pumped ∼2mum laser structures with InGaAsSb quantum wells and AlGaAsSb barriers both grown using the digital alloy technique. Room temperature operation, a low threshold current density of 104 W/cm2 (at 80K with 808nm pump), and a characteristic temperature (To) of 104 K show the feasibility of applying digital alloying techniques to mid-infrared optical devices.