| One important goal of micro electro-mechanical systems (MEMS) development is to seamlessly interface microelectronics with the non-electronic world in an integrated manner. In the mean time, integrated micro fluidic devices and systems are expected to extract biomedical information in ways similar to how IC-chips process electrical current. Therefore, functional integration and fabrication process integration are the keys and challenges to MEMS development.; This work is first devoted to developing novel low-temperature MEMS fabrication technologies that use Parylene as a micro-structural material. A bromine trifluoride (BrF3) gas phase silicon etching method for micromachining is then developed. Combining with the Parylene processes, BrF3 etching method plays important roles in bulk silicon etching, the release of Parylene freestanding structures and silicon surface treatment.; The developed technology facilitates wafer scale post-CMOS integration and integrated micro fluidic systems. Using this technology, a Parylene-based electro-spray chip for protein mass spectrometry, a single chip micro check valve, an in-channel normally closed check valve, and a fully integrated shear stress sensor are successfully designed, fabricated, and tested. |
