| The effective implementation of optical metrology and its associated instrumentation involves a multi-disciplinary approach. This dissertation will draw from mechanical, electrical, and optical engineering subject areas in order to implement the proposed resolution and functionality enhancements. The discussion will focus on three forms of optical metrology: optical displacement sensing, scatterometry, and interferometric weak measurements. A variety of novel concepts and experiments will be presented within these fields of research.;First, in optical displacement sensing, increased degree-of-freedom measurements will be explored. The development of a three degree-of-freedom displacement measuring interferometer will serve as the foundation for a six degree-of-freedom optical measurement system. In the pursuit of simultaneous six axis measurement, novel straightness and roll angle sensors will develop.;Second, a novel form of scatterometry that uses a spatially varying polarization applied to a focused beam will be presented. The principles of precision control and optical holography are necessary in the system development of the instrument. It will be shown that lateral scanning applied to the inspected sample greatly enhances sensitivity to changes in process parameters.;Finally, optical displacement sensing and scatterometry will find parallels through weak measurements. Both application areas have potential for vast performance improvements via the measurement of a weak value. The feasibility of weak value amplification will be investigated for optical roll sensing and the novel scatterometry approach using an interferometric analogy. |
