Development of ultrasonic electrostatic microjets for distributed propulsion and microflight

This dissertation details the first attempt to design and fabricate a distributed micro propulsion system based on acoustic streaming. A novel micro propulsion method is suggested by combining Helmholtz resonance, acoustic streaming and flow entrainment and thrust augmentation. In this method, oscillatory motion of an electrostatically actuated diaphragm creates a high frequency acoustic field inside the cavity of a Helmholtz resonator. The initial fluid motion velocity is amplified by the Helmholtz resonator structure and creates a jet flow at the exit nozzle. Acoustic streaming is the phenomenon responsible for primary jet stream creation. Primary jets produced by a few resonators can be combined in an ejector configuration to induce flow entrainment and thrust augmentation.; Basic governing equations for the electrostatic actuator, deformation of the diaphragm and the fluid flow inside the resonator are derived. These equations are linearized and used to derive an equivalent electrical circuit model for the operation of the device. Numerical solution of the governing equations and simulation of the circuit model are used to predict the performance of the experimental systems. Thrust values as high as 30.3μN are expected per resonator.; A micro machined electrostatically-driven high frequency Helmholtz resonator prototype is designed and fabricated. A new micro fabrication technique is developed for bulk micromachining and in particular fabrication of the resonator. Geometric stops for wet anisotropic etching of silicon are introduced for the fist time for structure formation. Arrays of high frequency (>60kHz) micro Helmholtz resonators are fabricated. In one sample more than 1000 resonators cover the surface of a four-inch silicon wafer and in effect convert it to a distributed propulsion system. A high yield (>85%) micro fabrication process is presented for realization of this propulsion system taking advantage of newly developed deep glass micromachining and lithography on thin (15μm) silicon methods. Extensive test and characterization are performed on the micro jets using current frequency component analysis, laser interferometry, acoustic measurements, hot-wire anemometers, video particle imaging and load cells. The occurrence of acoustic streaming at jet nozzles is verified and flow velocities exceeding 1m/s are measured at the 15μm x 330μm jet exit nozzle.