Residual stresses in cubic boron nitride thin films deposited by ion-assisted laser ablation
Posted on:1996-09-23
Degree:Ph.D
Type:Dissertation
University:University of California, Davis
Candidate:Cardinale, Gregory Frank
Full Text:PDF
GTID:1461390014988230
Subject:Engineering
Abstract/Summary:
Residual stresses of cubic boron nitride (cBN) thin films deposited using ion-assisted pulsed laser ablation were investigated. The residual stresses were determined by measuring the deflection of cantilever beams micromachined from (100)-oriented silicon, and the hardness and elastic modulus of sp...