MEMS technology and devices for a microfluid dosing system

Microelectromechanical systems (MEMS) technology has matured to the point where practical biological and chemical applications are possible. One particularly active research area is in the development of lab-on-a-chip type systems. In order to create successful lab-on-a-chip and other microfluidic systems, it is necessary to have the capability of controlling and directing fluid flow. Such functionality can be found on the front end of a microfluidic system and is known as a fluid delivery or dosing subsystem. For a MEMS micro fluid dosing system to be realized, several components are necessary. The essential components include a fluid actuator, a fluidic control device, and micro plumbing. A prototype fluid delivery system is demonstrated here using a micropump as the fluid actuator, a thermal flow sensor as the fluidic control device, and micromachined couplers as plumbing. The technology to build these components has been developed and each of these components have been fabricated and tested. A prototype constructed of discrete components has also been demonstrated. A truly integrated, channel-based fluid dosing system can be achieved through device scaling.