Supersonic molecular beam studies of the dissociative chemisorption of group IV hydrides on single crystal silicon and germanium

Posted on:1998-12-19

Degree:Ph.D

Type:Dissertation

University:Cornell University

Candidate:Jones, Martha Elizabeth

Full Text:PDF

GTID:1460390014975843

Subject:Chemical Engineering

Abstract/Summary:

upersonic molecular beam scattering techniques were employed to investigate the reaction of SiH;In a separate project, the thermal and plasma-assisted nitridation of GaAs(100) using NH;The influence of simultaneous atomic H flux on selectivity during deposition of Si thin film employing a supersonic molecular beam of...

Keywords/Search Tags:

Molecular beam

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