Particle -in -cell simulations of bounded plasma discharges applied to low pressure high density sources and positive column

Particle-in-cell (PIC) simulations of bounded plasma discharges are attractive because the fields and the particle motion can be obtained self-consistently from first principles. Thus, we can accurately model a wide range of nonlocal and kinetic behavior. The only disadvantage is that PIC may be computationally expensive compared to other methods. Fluid codes, for example, may run faster but make assumptions about the bulk plasma velocity distributions and ignore kinetic effects. In Chapter 1, we demonstrate methods of accelerating PIC simulations of bounded plasma discharges. We find that a combination of physical and numerical methods makes run-times for PIC codes much more competitive with other types of codes.;In processing plasmas, the ion energy distributions (IEDs) arriving at the wafer target are crucial in determining ion anisotropy and etch rates. The current trend for plasma reactors is towards lower gas pressure and higher plasma density. In Chapter 2, we review and analyze IEDs arriving at the target of low pressure high density rf plasma reactors. In these reactors, the sheath is typically collisionless. We then perform PIC simulations of collisionless rf sheaths and find that the key parameter governing the shape of the TED at the wafer is the ratio of the ion transit time across the sheath over the rf period.;Positive columns are the source of illumination in fluorescent mercury-argon lamps. The efficiency of light production increases with decreasing gas pressure and decreasing discharge radius. Most current lamp software is based on the local concept even though low pressure lighting discharges tend to be nonlocal. In Chapter 3, we demonstrate a 1d3v radial PIC model to conduct nonlocal kinetic simulations of low pressure, small radius positive columns. When compared to other available codes, we find that our PIC code makes the least approximations and assumptions and is accurate and stable over a wider parameter range. We analyze the PIC simulation results in detail and find that the radial electron heat flow, which is neglected in local models, plays a major role in maintaining the global power balance.;In Chapter 2, we focused on the sheaths of low pressure high density plasma reactors. In Chapter 4, we extend our study to the bulk and presheaths. Typical industrial plasma reactors often use gases with complex chemistries which tend to generate discharges containing negative ions. For high density electronegative plasmas with low gas pressure, we expect Coulomb collisions between positive and negative ions to dominate over collisions between ions and neutrals. We incorporate a Coulomb collision model into our PIC code to study the effect of this ion-ion Coulomb scattering. We find that the Coulomb collisions between the positive and negative ions significantly modify the negative ion flux, density and kinetic energy profiles.