Design, modeling, analysis, fabrication, and testing of MEM-mirrors for tunable VCSELs

Tunable VCSELs (vertical cavity surface emitting lasers) play crucial roles in DWDM (dense wavelength division multiplexing) systems and are vital in enabling the future of optical networks. The most successful method to realize wavelength tenability is MEM-VCSELs via microelectromechanical (MEM) technology. The key parts to accomplish wavelength tuning in those MEM-VCSELs are controllable top mirrors.; Four mirror models were created and will be presented. A thorough theoretical analysis, including both static and dynamic aspects, was developed on the models. The key microfabrication methods will be presented, including cleaning, deposition, patterning, optical lithography, etching, and lift-off. MEMS metrology will be presented. Dynamic measurement techniques were prompted by the need to improve the reliability and predictability of MEMS devices. The fabricated MEM-mirrors were experimentally investigated. A discussion of both the theoretical and actual results will be presented.