| Microring resonators are a fundamental building block for integrated optical filters, and have both modulation and waveform generation applications. A hybrid chalcogenide (As2S3) on titanium diffused (Ti:LiNbO3) waveguide platform has been developed to realize tunable microring resonators on a lithium niobate (LiNbO3) substrate. The use of a LiNbO3 substrate allows for electro-optic tuning, which is demonstrated for the first time on an As2S3 guided optical mode. While optical modes confined in diffused waveguides are commonly electro-optically tuned, the use of a rib waveguide external to the substrate poses new design challenges. Simulation work to determine the optimum electrode design was carried out, while also taking into account the limitations of working with a low melting temperature chalcogenide material.;The tuning of this hybrid As2S3 on Ti:LiNbO 3 device structure is demonstrated with fabricated Mach-Zehnder interferometers and ring resonators. Electro-optic tuning of the TM polarization utilizing the r13 LiNbO3 tuning coefficient is shown, yielding results that show an improvement over previous tunable LiNbO3 microring resonators. Simulations are also carried out to show the waveform generating capabilities of this hybrid device platform. |
