| The technology of power circuit breakers has advanced in the past two decades with the development of high speed solid-state breakers and electronic transfer switches. However, these high power switches have not been widely commercialized because of their high cost and lossy nature when compared to the slower conventional mechanical breakers. This dissertation developed a low cost, distribution class breaker utilizing micro electromechanical system (MEMS). MEMS has the capability of high speed switching compared to mechanical breakers and improved power handling efficiency over solid-state breakers. In this design, series and parallel components of lower ratings are used to achieve the high voltage and current requirements. An M x N array of low power MEMS switches were designed and fabricated to handle high power which are mass actuated by an external magnetic field. These switches were tested and characterized. The reliability of these devices was investigated to handle stress in medium and high power applications. Useful insights were gained on the integration of MEMS with conventional CMOS process along with issues related to packaging. This dissertation provides the complete path finding for MEMS circuit breakers from conceptualization to development as a product. |
