Electrostatic shape control of single crystal silicon (SCS), free standing, thin plate deformable mirrors

This research involved the creation and investigation of a low cost design for a MEMS platform capable of controlled shape morphing using very simple mechanical design and manufacturing processes. The platform is made of single crystal silicon and loaded with multiple in-plane forces and moments from three fixed positions on the plate boundary, and with distributed electrostatic forces across the platform surface. This work is important because such a platform could be used as a deformable mirror for adaptive optics systems used in laser communications, vision science, precision beam shaping, and many other important applications.; The work involved the development and experimental validation of analytical models that can map the displacement field of a thin flat SCS plate subject to complex loading on the boundary and distributed electrostatic forces. The achievement of these goals included experimentally mapping the platform surface after deformation into three-dimensional geometries defined by the Zernike polynomials. These are relatively large elastic deflections requiring a highly nonlinear analysis. The current analysis applies to circular plates supported on buckled flexures, which have been designed based an model results, fabricated using common microelectronic fabrication processes, and characterized using optical and interference microscopy.; Of special interest is the investigation of post-buckling behavior which enhances the range and robustness of operation of the device by providing local upward motion for some modes.; The prototypes have been tested and the results compared well with the theoretical results. The first 15 Zernike modes were examined with successful mode shape generation of 13, and fitting errors less than unity were achieved for all 15. From continued analysis of the experimental results the models can be further enhanced to create a commercially viable real time control algorithm for the device.