Modelling and diagnostics of atmospheric argon radio frequency inductively coupled plasma

This dissertation describes the work on the modelling and diagnostics of atmospheric argon radio frequency (RF) inductively coupled plasma (ICP).; The assumption of the Maxwellian electron energy density function (EEDF) in the two-temperature model was examined by applying the Boltzmann equation solver ELEN-DIF program. The Maxwellian EEDFs of 13.56 and 40 MHz argon RF ICP, under non-equilibrium conditions, are proved to give inaccurate estimations of the high energy electron population and the energy transfer from the electrons to atoms/ions, which will consequently affect prediction of the plasma fields.; We developed a new integrated model by applying the EEDF obtained using the Boltzmann equation solver ELENDIF. The two-temperature model and ELENDIF program were combined and numerically solved together. The Maxwellian EEDF assumption was then relaxed in the new model. The model was applied to calculate the plasma fields for argon RF ICP at frequencies 13.56 and 40 MHz. The results show that the Maxwellian EEDF is still a good assumption for a 40 MHz argon RF ICP, whereas it will cause errors for the predictions of the plasma fields of the 13.56 MHz plasma. The new model can treat more complicated cases of argon RF ICP.; A fully computer-controlled optical emission spectroscopy (OES) experimental system was established during this project, and it was used to measure the plasma temperature and electron densities of a 40 MHz argon RF ICP. The excitation temperature measured from the Boltzmann plot, and electron density from the continuum emission are proved to be reliable estimations. The temperature measurement showed agreement with the prediction of the model, whereas the estimation of the electron density needed improvement.; Emission asymmetry was found to exist within the coil zone of the RF plasma. The tomography technique was applied to obtain the two-dimensional local emission profile of a 40 MHz argon RF ICP. This technique provides the basis for further investigation of the effect of the emission asymmetry on the plasma field measurement, and development of the current model.