Using electron-tunneling refrigerators to cool electrons, membranes, and sensors

Many cryogenic devices require temperatures near 100 mK for optimal performance, such as thin-film, superconducting detectors. Examples include the submillimeter SCUBA camera on the James Clerk Maxwell Telescope, high-resolution X-ray sensors for semiconductor defect analysis, and a planned satellite to search for polarization in the cosmic microwave background. The cost, size, and complexity of refrigerators used to reach 100 mK (dilution and adiabatic demagnetization refrigerators) are significant and alternative technologies are desirable. We demonstrate work on developing a new option for cooling detectors to 100 mK bath temperatures.;Solid-state refrigerators based on Normal metal/Insulator/Superconductor (NIS) tunnel junctions can provide cooling from pumped 3He bath temperatures (∼300 mK) to 100 mK. The cooling mechanism is the preferential tunneling of the highest energy (hottest) electrons from the normal metal through the biased tunnel junctions into the superconductor.;When NIS refrigerators are combined with a micro-machined membrane, both the electrons and phonons of the membrane can be cooled. We have developed NIS-cooled membranes with both large temperature reductions and large cooling powers. We have shown the first cooling of a bulk material by cooling a neutron transmutation doped (NTD) thermistor.;The fabrication of NIS refrigerators can be integrated with existing detector technology. For the first time, we have successfully integrated NIS refrigerators with both mm-wave and X-ray detectors. In particular, we have cooled X-ray detectors by more than 100 mK and have achieved a resolution of <10 eV at 6 keV at a bath temperature 85 mK above the transition temperature of the detector. The use of integrated NIS refrigerators makes the remarkable performance of cryogenic detectors available from 300 mK platforms.;We have also performed preliminary work towards building a general-purpose cooling platform for microelectronics devices on separate chips.