Dynamics-Based Integrated Design Methodology And Implementation Technology For Ultra-Precision Positioning Stages

The design requirement of motion accuracy of ultra-precision positioning stages has increased continually and reached the level of sub-nanometer in the past decades.And the dynamic characteristics have become crucial for motion accuracy of ultra-precision positioning stages.It is essential to evaluate and optimize the dynamic characteristics and accuracy performances of ultra-precision positioning stages from systematic perspectives,in all design phases from conceptual design to system detailed design,in order to reduce design iterations in product development,shorten development cycles and reduce risks.However,abundant knowledge and experience to model and analyze the system schemes of ultra-precision positioning stages are required of designers,in order to correctly model the dynamic behaviors and coupling effects of key components in the stages,and to comprehensively evaluate the dynamic characteristics and accuracy performances of the schemes.It is an important issue to reduce difficulty and improve efficiency in the detailed scheme design of ultra-precision positioning stages that how to encapsulate,integarate and reuse the methods and tools to model and analyze the key components and system schemes.The integrated design method and corresponding software implementation are the main two aspects studied in this dissertation.An integrated design framework is studied,as well as its key modules and algorithms,to support the modeling and analysis process of the system schemes of ultra-precision positioning stages.Prototype software systems of the integrated design framework are developed,and the equivalent modeling methods of key components are abstracted and encapsulated,in order to improve the design process of the detailed schemes of ultra-precision positioning stages,and to provide tool support for the development and innovation of ultra-precision positioning stage products.A dynamics-based integrated design framework for the detailed schemes of ultra-precision positioning stages is proposed by analyzing the characteristics and requirements of the design processes of detailed schemes,to provide a system-level solution for the encapsulation,integration and reuse of the modeling and analysis methods and tools of key components and systems.In the framework,the modeling and analysis methods are encapsulated as component templates,simulation scripts,post-processing tools and other entities.In each design phase,the modular equivalent models of key components with dynamics parameters as the main parameters are generated by instantiating component templates,and are used to assemble system scheme model;the system scheme is comprehensively analyzed by the simulation scripts and post-processing tools,to ensure satisfactory dynamic performances,so that the dynamics parameter values in the system and component models can be taken as the design objectives and constraints for subsequent design activities.Model primitives are proposed,as well as generic methods of model instantiation,editing and converting based on model primitives and template libraries.Diverse types of component models,as well as system models with diverse topologies,can be represented as combinations of model primitive objects.Operational information data related to specific component types is saved in the template libraries.Diverse component and system models can be created,edited and converted using the same algorithms,by extracting the operational information from the template libraries and performing corresponding operations.And a template encapsulation method is proposed based on the model primitives,which can extend support for new types of component models by editing template library files,without reprograming software modules.According to the flowchart to abstract formalized equivalent modeling methods of components,the modular and parametric equivalent dynamic modeling methods are abstracted for key components such as typical structural configurations,vibration isolators,aerostatic bearings and measuring devices.And the corresponding templates and design tools are encapsulated,which are reusable to model different design cases of key components.The equivalent dynamic models of key components instantiated by the templates can be assembled into a system scheme model by connecting the interfaces of different component models.Prototype software systems of the integrated design framework are developed.A systematic approach to modeling the dynamic accuracy of an ultra-precision positioning stage is developed by integrating the multi-rigid-body dynamic model of mechanical system and the measurement system model in the prototype systems.The influence of structural and dynamics parameters,including aerostatic bearing configurations,nonlinear stiffness characteristics of aerostatic bearings,motion plane errors,foundation vibrations,and positions of the acting points of driving forces,on dynamic accuracy is investigated by adopting the H-type configured stage as an example.In order to validate the studies in this dissertation,a prototype system of the integrated design framework is applied and tested in the design of an ultra-precision positioning stage used in a packaging lithography machine.The application results show that the software system can effectively reduce the workload of modeling and analysis,improve the design efficiency,and is a useful tool for the design and analysis of complex electromechanical systems.