Study On The Infrared Focal Plane Integration Technology Based On Rectangular Aperture Micro-Lens Arrays

Infrared detector is one of the devices that it can turn incident infrared radiation signal into electrical signal by photoelectric effect, infrared detector technology level represents a Country’s level of infrared technology development level. Infrared focal plane array detection technology generatiing with the development of infrared technology development, it represents the milestone of infrared detector technology. Infrared detection system has been applied widely in civil industry, military field, and space technology. Because of the particularity in military field and space technology, sensitivity and resolution is required as high as possible, but infrared focal plane array size is required as small as possible, so this contradiction must be solved in the development process of infrared detector. We proposed that rectangular aperture spherical micro-lens arrays was manufactured by varing dose exposuring, that integrating infrared focal flane and micro-lens arrays was studied by optical cement technology, then the problems of detector sensitivity and resolution were solved.Micro-lens arrays paraxial ray propagation law was studied by geometrical optics theory, we analysised single layer spherical micro-lens array optical imaging and illumination properties, double layer spherical micro-lens arrays optical imaging and illumination properties, the comparison study of optical imaging and illumination about single layer and double-layer spherical micro-lens arrays. Meanwhile, the advantages of light energy utilization was analysised that rectangular aperture spherical micro-lens arrays in comparison to circular aperture spherical micro-lens arrays.We studied the technics principle that manufactureing rectangular aperture spherical micro-lens arrays by laser direct writing varing dose exposuring, that mathematical model of varing dose exposure was established on the Basis of mastering exposure and developing properties. It was analysed the working principle of subsystem that laser direct writing optical power controlling, micro-displacement driving etc. Studied on controlling method of laser direct writing varing dose exposuring according to mathematical model and micro-lens arrays structure.Manufactureing technics process of rectangular aperture spherical micro-lens arrays was designed, effect factors of each technics taches were analysised by theoretics analysis and a great deal experiments, process parameter optimized. We tested micro-lens arrays structure by atom force microscope, that micro-lens arrays optical performance parameter testing system was built, optical performance of that focus, the intercept, point-spread function were tested.Studied on working theory and structure of infrared focal plane array, optical assembling energy assemble was analysed form light refraction theory and light diffraction theory, the technology was put forward that integrating infrared focal plane array and micro-lens arrays by optical cement method. That double marker of aimming at infrared focal plane array and micro-lens arrays were designed and manufactured, two elements were aimmed by diffraction gratting coaxial optical system. Contrasted the performance change of the front and back of integration by infrared focal plane array testing system, and analysed the testing result. The conclusion as follows:light energy utilization ratio of infrared focal plane raised to90%from55%by integrating rectangular aperture micro-lens arrays, others properties keep invariant.