The Research Of Integrated Wireless Sensing System Based On Felm Bulk Acoustic Resonator

Acoustic wave technology and components based on acoustic technology have been widely used in communication field, the field of automatic control, sensor and controlling field for nearly70years.Film Bulk Acoustic Resonator,(referred to as "FBAR"), is a piezoelectric acoustic wave device, with its tiny size, low power consumption, low cost, and high Q value, radio frequency of working frequency, high sensitivity, high resolution, which can withstand high power capacity, and its compatibility with the CMOS integrated circuit technology, in less than twenty years, occupies the application field of whole wireless communication field.In the application field of sensors, a single FBAR or FBAR array are widely applied for molecular mass detection, biochemical detection (DNA detection, detection of antibody and antigen detection), liquid detection, gas detection, pressure detection, deformation detection, acceleration and inertia detection, temperature detection, ultraviolet detection, explosive detection etc.In this paper,"The Research of Integrated Wireless Sensing System Based on Film Bulk Acoustic Resonator" is the main research content of the national high technology research and development program (863Program), and the National Natural Science Foundation of China. With the support of the above fund, it completed four kinds of wireless sensor integrated system based on the technology of FBAR.The innovation and achievements of the work of this paper mainly include the following aspects.1. It completed the acquisition of FBAR samples of the sensor part, which including:FBAR fabrication in our clean room, while FBAR fabrication in the UK University of Cambridge of an outside foundry lab, and obtain the single FBAR sample through the separation of the current FBAR production with high Q value; studied the process technology and testing technology of separation, preparation of FBAR.2. Research on temperature compensation technique of FBAR devices, and it proposed and demonstrated a novel self-adaptive approximate impedance matching method based on FBAR, for temperature compensation; and with the combination of automatic testing technology, it designed a software "Self-Adaption Approximate Impedance Matching and Automatic Testing of FBAR Based on Virtual Instrument Software", and made complementation of the self-adaptive approximate impedance matching method with the software, realizes FBAR automatic test and self-adaptive impedance approximate matching, and it hasn’t been reported in the literatures of same research field.3. Adopting the current reusing crossing coupled structure, it designed a FBAR CMOS oscillator with low power consumption, low phase noise by CMOS integrated circuit process, and the power consumption is only1.8mW@1.878GHz while the voltage is900mV, and it is with ultra low phase noise:-107dBc/Hz@10kHz and-135dBc/Hz@100kHz. The FoM of whole FBAR CMOS oscillator is-238dBc/Hz, which is the leading level in the papers of the same research field.It completed the temperature compensation of FBAR oscillator using the self-adaptive impedance matching approach, then it obtained the FBAR oscillator, with the output power of more than7dBm (temperature coefficient of power0.43ppm), and resonant frequency is larger than1.8GHz, and phase noise is-117dBc/Hz@100kHz and below-139dBc/Hz@1MF; while the FoM of whole FBAR oscillator is better than the-190, in the papers of the same research field with equivalent fabrication process, this FBAR oscillator is the leading level.4. It designed and implemented the frequency reading circuit system with method of counting frequency based on FBAR oscillator, and simulated and verified the system with FPGA platform, then the first kind of wireless sensing integrated system based on the technology of FBAR. And it completed the tape-out of the ASIC chip of the frequency reading circuit system with method of counting frequency, with the SMIC (SMIC)0.18um CMOS process, with the precision of1KHz. Then it completed the second kind of wireless sensing integrated system based on the technology of FBAR.5. It proposed and developed a novel four-mixer-structure frequency reading circuit system with high precision adopting the mixing method based on FBAR oscillator, to be applied in the FBAR sensor signal processing circuit system, and its frequency accuracy is below1Hz, and it hasn’t been reported in the literatures of similar research field.It proposed and developed a novel multilevel energy-saving control method and device of the wireless sensor network node circuit of RF front-end based on the frequency reading circuit system of FBAR. Then it completed the second kind of wireless sensing integrated system based on the technology of FBAR, and it hasn’t been reported in the literatures of similar research field.