Micro-optical-mechanical Cantilever Array Infrared And Terahertz Imaging Technology

21st century, the research for optical and mechanical system has entered intomicron even nano scale. Recently, some difficult problems can be resolved usingMOMS (Micro-Optical-Mechanical-System) technology. The MOMS is leading a newround of revolution in Optics, Electronics, Biomedical, Physical, Chemistry and othertraditional subjects. In imaging field, because the novel imaging equipment based onMOMS technology has the advantages of easy fabrication, sensitive, quick response,and low cost and so on, researchers began to use MOMS technology for infrared (IR)and terahertz (THz) detecting.The thesis focuses on IR and THz imaging technology based onmicro-optical-mechanical cantilever focal plane array. The cantilever array can convertspecific waveband electromagnetic radiation to heat. Then, the reflectors in thecantilevers will deflect. We can get the target’s radiation magnitude value using opticalreadout methods. Then the target’s2-Dimensional radiation field can be acquired, thatmeans the radiation distribution can be shown (realizing imaging). The thesis includestwo parts: first part discussed optical readout microcantilever focal plane array IRimaging technology; second part studied microcantilever focal plane array THzimaging detector based on metamaterials.The first part includes:1) Briefly introduce the design and principle of the optical readout microcantileverfocal plane array IR imaging detector. Then, design and build a novel optical readoutmicrocantilever focal plane array IR imaging system based on narrow-strip filter.2) Propose the Windowed XOR method for acquiring IR images in the IR imagingsystem. The method is simpler and faster. Proposed the Pixel array matching methodby which the CCD’s pixel array can match the low resolution FPAproperly.3) Study and verify the optical readout microcantilever focal plane array IRimaging system can respond multi-bands IR radiation, and realizing the short-waveinfrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR)imaging. Then, a microcantilever array damage experiment using an infrared laser astarget was conducted and a method based on optical reflection principle was proposed to measure the cantilever’s critical deflection angle. Furthermore, the tolerable targettemperature based on the imaging system was calculated.4) Propose a novel adaptive total reflection optical readout method for thebimaterial microcantilever focal plane array infrared imaging system. It can directlyacquire infrared images by all optical operation.In the second part, the absorption function of metamaterial structure is introduced.Then, two types of single-band THz imaging detector which perfectly integratesmetamaterial absorber and optical readout bimaterial mechanical cantilevers areproposed firstly. The characteristics and performance are simulated and analyzed.Next, we proposed the design of dual-band THz imaging detector based onsignal-band THz imaging detector. Then simulate and analyze its characteristics andperformance.Finally, we fabricated the three types of THz imaging detector, and then measuredtheir transmissions using the THz-TDS. The measurement results are consistent withthe simulation results.The thesis presents an electromagnetic radiation thermal imaging method bydiscussing the MOMS cantilever focal plane array IR and THz imaging technology. Themethod uses the optical readout technology and CCD acquring image; rejects electricalreadout technology needed complex electrical readout circuits. Theoretically, themethod can be applied to the different electromagnetic radiation wave band imaging(infrared, terahertz, and millimeter), by designing the metamaterial absorber’s structuresin specific waveband.