Study On Mems Piezoresistive Cantilever Biochip Based On Gold Nanoparticles Labeled

It has developed the National Science and Technology Major Project of "cultivation of new varieties of genetically modified organisms of major projects" by The Ministry of Science and Technology of the People’s Republic of China. The major food crops and cash crops is about to breed a large number of new varieties of genetically modified. It will bring our country and even the entire world within the scope of agricultural production, economic, trade, food, environmental and ecological safety a major impact. We need in a timely manner appropriate detection technology, for the safety of China’s agriculture, environmental, ecological, food, economic, trade.With the development of MEMS technology, BioMEMS technology has been widespread concern. In this paper, it aims to the detection of genetically modified organismo using BioMEMS technology. In the appropriate biochemical reactions conditions, judge whether the hybridization reaction of gene targets and sample gene probe, and then judge if there are genetically modified fragment of the sample. The probe immobilization, hybridization reactions and corresponding biochemical reactions occur on MEMS cantilever surface. Due to nucleic acid itself, the mass is very light, even at least20nucleotide oligonucleotide almost no mass, information of the hybridization reaction is difficult to mechanical deformation of the MEMS cantilever. The characteristics of the nanoparticles, the characteristics of heavy metals are studied, as gold nanoparticles has many advantages, does not affect the biological activity, so it introduced the inert heavy metal gold nanoparticles into the BioMEMS. According to Au-S strong chemical bond and biotin-avidin strong binding principle, make gold nanoparticles bond hybrid information. Since the gold nanoparticles is far greater than the mass of nucleic acid, gold nanoparticles pressure MEMS cantilever beam, making the cantilever bending, to improve the detection sensitivity, and We have established a testing process program. The cantilever pressure sensor of Hooke’s law, the stiffness matrix, the soft matrix, elastic modulus, and the deflection of the film approximation are studied. Piezoresistive effect of semiconductor piezoresistive tensor and the piezoresistive coefficient are studied. MEMS cantilever bending force is analyzed, and the location of the varistor is design. The relationship cantilever size and the performance parameters, including noise, sensitivity, minimum resolution, elastic modulus, and bandwidth is studied, and the impact of noise on the doping concentration, and size is studied, finally optimized cantilever is designed. Microfluidic technology as a media or bridge of biological solution and the cantilever is studied. Laminar flow of the multi-channel mixer and enhance the cantilever surface biochemical reactor are designedThe main innovative points of this paper are as following:1. This paper first proposes a method and process of gold nanoparticles into the the BioMEMS cantilever detection system. In order to overcome the detection disadvantage of weak micro-DNA nucleic acid mass, even the oligonucleotide almost no weight, and to improve the characteristics of the gravity of hybrid information and improve the detection sensitivity of the MEMS cantilever, the characteristics of the nanoparticles are studied, and then the characteristic properties of the heavy metal inert gold nanoparticles are studied, according to the Au-S, biotin-avidin binding principles, a process of gold nanoparticles modified hybrid information is established. And a detection scheme of gold nanopartiles pressure MEMS cantilever is designed, and then a multi-channel detection scheme is designed for high-throughput.2. This paper innovatively optimized design a U-shaped piezoresistive MEMS cantilever. The parameters and technology of the MEMS cantilever pressure sensor are studied, and no-load cantilever stress and strain experiments are simulated. The working principle of the gold nanoparticles labeling MEMS piezoresistive cantilever biochip for genetic testing is discussed. The stress and strain of a bending cantilever structure are analyzed. Piezoresistive cantilever various performance parameters and the impacts of the parameters for the cantilever size are analyzed. The impacts of Johnson noise and1/f noise are studied.3. This paper first design a device model to enhance cantilever surface biochemical reactions within microfluidic channels. The microfluidic technology and the microfluidic chip technology within biochemical reactions are studied. The advantages and disadvantages of several substrates materials and several microfluidic layer materials are studied, and then select the optimal microfluidic chip materials suitable for this paper. In order to solve the problem of different solutions from different channels mixing slowly, an electroosmotic flow mixer is designed, and then simulation experiment is done. In order to enhance cantilever surface biochemical reactions, to reduce the solution consumption, and to reduce reaction time, a microfluidic channel reactor for cantilever surface biochemical reaction is designed, and then simulation experiment is done.Finally, the research work is summarized, and the direction for further research is pointed out.