Based On Micro-processing Technology, Optical Switching And Optical Interconnection Structure Research

This dissertation is devoted to a study on the non-silicon micro-machining based optical switch and soft-lithography-based micro optical components.The content of the dissertation is classified into two parts. One is the research of non-silicon micro-machining based optical switch. The other is on the research of soft-lithography-based micro optical components. We investigated these two kinds of devices both in their theoretical designs and experimentations.The part one includes four chapters. Main content of this part is summarized in the following:Chapter 1 provides a brief introduction of pertaining background technologies for the devices studied herein.Chapter 2 introduces a non-silicon based low driving voltage 1×8 latching optical switch. This switch was characterized as small-volume, low-cost, and easy to expand. Featuring a small footprint and high integrated latching micro-mirror driving unit, the port number of the optical switch can be upgraded to N ×N (N>4). And a series of switch prototypes based on the design has passed the certification of new production of Zhejiang province.Chapter 3 summarizes a micromachining—based miniature 1×2 MEMS optical switch. The switch comprises of a micro-mirror driven by electromagnetic actuator with a unique configuration using a permanent magnet. The switch time was measured <3ms at 5VDC application and a packaged size reached as small as 21 ×16× 12.6mm. A lifetime test of 5×10~6 repetition was conducted and the switch exhibits a stable operation through out the test.When it comes to the chapter 4, a design of micromachining based 1 X 2 direct-coupled fiber switch is introduced. CNC engraving and EDM techniques were used to fabricate a switch sample where a movable fiber mounted on a micro-machined flexure is driven electromagnetically, and output light beam is directly coupled to either of end surfaces of other two fibers;the switch features a low driven voltage(5V), fast switch(<2ms) and low insertion loss(0.9dB~l.ldB).In chapter 5, a summary of the switch manufacture and package details are presented.Therealizing technology, part analysis and a comparison among package methods are introduced to facilitate the packaging of aforementioned optical switches.The part two is consisted of two chapters, as shown in following:In chapter 6, a low-cost, versatile optical coupling structure featuring a monolithic integration of a polymeric waveguide, beam ducts, and end-reflectors has been designed, prototyped, and demonstrated to be capable of sustaining high misalignment errors whilst maintaining usability in coupling efficiency. The soft lithography fabrication process of this interconnection design allows for significant advantages over traditional designs in terms of misalignment tolerance, manufacture cost and speed, as well as 3-D integration capability.Chapter 7 presents a design of directional coupler based polymeric electro-optical switch that features a very low wavelength dependence and low sensitivity of dependence of optical characteristics on coupling length, which makes it possible to form the polymer structure on silicon substrate by rubber molding process or other rapid printing techniques. The characteristics of the optical switch were analyzed by BPM simulations and an insertion loss as low as 0.4-0.6 dB was obtained, along with a crosstalk of -32dB and a PDL of 0.08dB. The driving voltage was found to be 42V when r33=14 pm/V.Summary and prospection is presented finally, and the farther research job of the optical switch and optical interconnection is given.