Technology And Applied Research Of Digital Waveferont Interferometry

The digital wavefront interferometer is discussed based on the phase shifting interferometry (PSI). The techniques about wavefront retrieve and automatic optical measurement are studied in this paper. An improved robust algorithm originated from the region growing, the seed algorithm, is presented, which is not sensitive to the shape of the interferogram's edge. The wavefront can be unwrapped from the interferograms with a large amount of noises, irregular patterns. The software is developed under the environment of Windows operation system, it includes the following functions: calibrating the phase shifter(PZT). analyzing and processing the interferograms. retrieving the wavefront and drawing the results with different graphics. A database management program is also included in the software. The software achieves the same accuracy as that of the similar software widely used in the world. The intellectualized technique for the traditional interferometer is researched. With enough sampling data points, the interferometer can test the optical components whose size is as small as the 1/15 of the interferometer's aperture. During the image's zooming, the irradiance on the CCD can be automatically adjusted to ensure the detector working in its linear response range. The position of the imaging plane can also be adjusted so that the image can be conjugated to the test piece to ensure the sharp edge of the interferogram. More attentions are taken to the applications of the interferometer for the quantificational and real-time measurements in the following aspects: the laser's wavefront, the homogeneity of laser bar, angle deviation of flatness optical components, and surface roughness. The hardware of the digital interferometer is highly integrated and intellectualized. The optical components with different shapes can be tested and the results are accurate and reliable. The interferometer obtains the same property as that of the popular interferometer in the world and its functions are widely extended...