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Design And Production Of Soft X-ray Multilayer Mirrors

Posted on:2003-01-29Degree:DoctorType:Dissertation
Country:ChinaCandidate:L M SongFull Text:PDF
GTID:1110360092480360Subject:Optical Engineering
Abstract/Summary:PDF Full Text Request
The appearance of soft x ray multilayer reflectence mirrors is an important event in x ray optics. It reformed the coventional grazing incidence method of reflecting x ray,and made it possible to reflect x ray in normal incidence way. It moves x ray optics forward greatly. Because soft x ray multilayer mirrors have high reflectivity and strip filter function, their applying territories are expanded contimuously. Various fields in x ray optics grow strong demands for them.In the longer wavelength(r>10nm) of soft x ray region(1nm
Keywords/Search Tags:soft x-ray multilayer thin film, peak reflectance, magnetron sputtering, small angle x ray diffraction, spectrometer, Inertial Confinement Fusion
PDF Full Text Request
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