MEMS Comb Linear Vibrated Gyroscope's Characteristic And Disturb Factor Influence Research

MEMS gyroscope inertia navigation and stabilized equip gained broad application in aviation, spaceflight and navigation et al field by its unique excellence. Precision shock ability of every weapon is an important actor that influenced the battle result at high-tech battlefield in modern times and forecasted future. Complex battlefield circumstance of strong technique opposition cries for micro- aerocraft, micro-robot et al micro spy equipment. Far distance precision shock cries for a great lot control and guide weapon like control and guide bomb, cannonball and throw in weapon of outside war zone et al. A mass of panzers, vehicles, warships and airplanes need provide every request pose stabilized ability for weapon, spy, detect and communicate equip. Huge demand spirit up the inertial navigation system and develop to low cost, micromation, low power consume, withstand crash. With the development of MEMS gyroscope, every weapon and weapon means of delivery of every army corps services in armed forces have control and guide, low cost navigation and pose stabilized equipment that can be used in normal in the future. This paper is researched on environment influence on MEMS gyroscope.In the paper, with the deep research and analyse of correlation theory and technical literature about MEMS comb linear vibrated gyroscope inside and outside country. The paper summarized the main content and key technique of this field and discusses the research actuality, exist issue and develop current of MEMS gyroscope. The MEMS comb linear vibrated gyroscope's configuration, capacitance, electrostatic and disturb factor influence was researched.The paper introduces several MEMS support flexibility girder. It designs a kind of flexibility girder combined the excellence of the U shape and the snake shape twist support configuration girder. It is mainly analyzed the physics performance of the key flexibility girder parts and receive its expression and the flexibility coefficient at each direction. It is summarized the characteristic of each direction and coupling direction about this kind of flexibility girder. It is better resolved the axis coupling by this kind of girder.The paper set up the damping model of the MEMS comb linear vibrated gyroscope based on the configuration and the air damp characteristic of the gyroscope. The damping model includes the two plan Couette-flow damping and the two plan Squeeze-film damping. It builds the driving mode and the detecting mode damping model of the MEMS comb linear vibrated gyroscope by combined the two kinds of damping. The paper builds the pressure model of the MEMS comb linear vibrated gyroscope according to three laws by using air molecule dynamics theory. And it researches the pressure influence for the MEMS comb linear vibrated gyroscope. From the research, the damping and the output of the gyroscope had huge changed when the pressure in high vacuum, it had big changed when the pressure in low vacuum and it had no clearly changed when the pressure approached or bigger than standard atmosphere. So the working pressure for the MEMS comb linear vibrated gyroscope is standard atmosphere. This is satisfied the require of working environmente and also in favor of the control pressure.The paper advances that the asymmetry configuration influences the driving electrostatic and builds the electrostatic coupling error model and the comb distortion model due to the asymmetry configuration.The paper builds the dynamics model for the MEMS comb linear vibrated gyroscope and analyses the unideal model error. It studies the acceleration and the others rotations of the carrier's influence for the MEMS comb linear vibrated gyroscope.The paper builds the temperature model by using mechanism dynamics theory and the thermodynamics theory. Based on the model and the simulation result, the configuration dimension change due to temperature is not small. Its influence on the gyroscope output and the phase cann't neglected. The flexibility coefficient change due to temperature is great. It is influenced the output and the phase of the gyroscope. The output of the gyroscope reduces along with the increase of the difference in temperature. The temperature change also influences the damping.