Micro Measurement Theory And Equipment Research Based On Rotational Stereoscopic Vision

The precision measuring technology is the prerequisite or basis for industry development. Improving the level of measuring technology would improve the machining precision. Precision measurement of MEMS (Micro Electro-Mechanical System) components is the key of improving machining quality of MEMS. Gaining the 3-D shape information or space position of MEMS components is very important in many applications, such as visual detection and control in micro machining, visual servo controlling in micro manipulation system et al. It is very inconvenient to machining, assembling or measurement on MEMS components because of its tiny size. The research works of this thesis is subject to "Research on the machining device for the die of microfluidic chips", the National 863 High Technology R&D Program (NO. 2002AA421150). With Micro die of microfluidic chips as the researching object, measuring the 3-D size of micro die as the goal, the research introduced the rotational stereoscopic vision theory to the measurement of MEMS components and developed a 3-D measurement device for micro die of microfluidic chips, thoroughly researched the rotational stereo measurement technology, the visual space distortion theory of micro visual space and calibration method for micro optical visual system. The measuring examples of micro objects indicate our system is successfully developed.1 Firstly in the dissertation, the importance of 3-D micro stereoscopic measurement of MEMS components was analyzed. After a survey of the research situation of domestic and abroad of 3-D micro stereoscopic measurement on MEMS components, the important meaning of distortion analysis was discussed. Then, the main research aim of this dissertation was put forward and the research contents were summarized.2 The 3-D rotational stereo measuring theory was deeply researched. 3-D stereoscopic measuring was firstly discussed in the thesis, and then the key techniques in the 3-D stereoscopic measuring system is in traduced. Based on a thorough research on the 3-D rotational stereoscopic measuring theory, integrated with characteristics of micro measuring system, a novel micro visual measuring system based on the principle of rotational stereo was developed. The micro measuring theory of the vision system was discussed, some key techniques in the system also been analyzed.3 . The visual space distortion theory of micro visual measuring space was researched. For micro measurement on the MEMS components, the 3-D micro vision space distortion in the MEMS component measuring system was discussed based on the imaging relationship in micro opticalvisual subsystem. The simulation results described a general law of 3-D visual space distortion in micro visual space and provided a theoretical evidence for the generation and rectification of actual distortion in visual space. Meanwhile, it provided a theoretical analysis basis for optical visual measuring or monitoring.4 A planar calibration method of the micro vision measuring system was researched. Firstly, the calibration methods and characteristics of 2-D micro vision measuring system and 3-D micro vision measuring system were surveyed. Then the difference between micro vision measuring system and ordinary vision system was discussed. Following a modified planar calibration method for micro vision measuring system was introduced and its arithmetic steps were discussed, finally an example was given out.5 A visual measuring instrument based on micro rotational stereoscopic vision was developed. Based on those former researched theories, the general solution of the system was provided, and then the hardware and software of the system were designed.6 The application measuring research on the micro die of microfluidic chips by the rotational stereo micro visual measuring method was carried out. Based on the discussion of the machining methods and the figure of the microfluidic chip die, the measuring process was described. Then an error analysis was given out.7 The research contents and conclusions of this dissertation were summariz...