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Keyword [chemical mechanical planarization]
Result: 1 - 20 | Page: 1 of 2
1. The Study Of CMP Process And Materials With Low Pressure And Low Abrasive Concentration Of Copper Interconnection For GLSI
2. Thermal Simulation And Key Technologies Of Chemical Mechanical Planarization (CMP) For Phase Change Memory
3. The Slurry Of Copper Chemical Mechanical Polishing And Planarization Process
4. Direct Shallow Trench Isolation Planarization Technology Research And Application
5. Investigation On Chemical Mechanical Planarization For The Functional Photoelectric Materials ZnO Thin Film
6. Research And Application Of Direct STI CMP Technology For 0.13μm And Beyond Process
7. Investigation On Damascene Structure And Mechanism Of Hafnium Oxide Chemical Mechanical Planarization
8. Stability Of The Alkaline Slurry For GLSI Multilayer Copper Interconnection
9. Study On The Intelligent Optimization Technology In Optimizing The CMP Process And The Polishing Slurry Of Copper
10. Study On Barrier CMP Material And Technology For 65nm And Below IC With Alkaline Slurry
11. Study On Material And Technology Of GLSI Aluminum Gate CMP
12. Study On Planarization Technology Of GLSI Multilayer Copper Interconnection
13. Study On Alkali Barrier CMP Material And Process With Low Abrasive Concentration For GLSI Multylayer Copper Wiring
14. The Defects Of Barrier Layer Planarization With Alkaline Slurry In GLSI Copper Interconnection
15. Study On The Galvanic Corrosion In Barrier Chemical Mechanical Planarization Of Great Large Scale Intergration With Copper Wiring
16. Study On The Optimization Of Barrier Cobalt Chemical Mechanical Planarization
17. Stability Of The Alkaline Copper CMP Slurry
18. Analysis And Application Research Of Silicon Oxide Chemical Mechanical Planarization Parameters For Wafers Below 150mm
19. Control And Optimization Of Cu CMP Dishing In GLSI Multilayer Copper Interconnects
20. Study On Barrier Cobalt Chemical Mechanical Planarization Based On SVM
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