The Study On Design And Fabrication Of The Silicon Micro Disk Resonator Gyroscope Based On Anodic Bonding

In this paper,a novel type of design and fabrication of the silicon micro disk resonator gyroscope based on anodic bonding was presented.This kind of gyroscope was fabricated with MEMS micro fabrication process.Firstly,the substrate was fabricated by etching the Schott BF33 glass with the wet etching process.Secondly,the fabricated glass substrate and the monocrystalline silicon wafer were bonded together with anodic bonding technology.Then,deep reactive ion etching was carried out on the bonded single-crystal silicon wafer to form the disk ring resonator and the electrodes simultaneously.Lastly,the processes of slicing up and cleaning were carried out to obtain the single gyroscope experimental sample.In this paper,the development process,structural characteristics,operational principle,scheme design,process implementation and testing methods of the micro disk resonator gyroscope were analyzed and explained in detail.In the scheme design,the structure size,material selection and processing technology of this kind of gyroscope were discussed,and the feasibility analysis was conducted.In the process implementation,the specific process design flow was given,and the actual processing was also carried out,and the problems encountered in the experimental process were analyzed and solved.In the testing methods,this paper mainly introduced how to measure the resonant frequency and the vibration displacement of the silicon micro disk resonator gyroscope.Based on the preliminary analysis of the fabricated silicon micro disk resonator gyroscope,this kind of silicon micro disk resonator gyroscope in structure achieved the desired results.However,the future experiment still needs to be optimized to achieve better performances.At present,the experimental work will build the experimental foundation for the fabrication of the micro disk resonator gyroscope in the future.