Research On The Fabrication Process Of Rotary And Symmetrical Resonator Of Micro Shell Vibrating Gyroscope

Recently, there has been a growing interest in micro shell vibrating gyroscope with a rotary and symmetrical resonator, due to their potential advantages of small size, high precision, large dynamic range, large bandwidth, high quality factor and high insensitivity to environmental vibrations, while there is few research reported at home,which is far behind research abroad. The fabrication process is still the key problem of micro shell vibrating gyroscope, which limits the development of micro shell vibrating gyroscope. This paper has explored the fab rication process based on different matericials in order to acquire a novel fabrication process that has an easy principle and a better consistency. This article has finished the following work:1. The basic structure and the operating principle of the Micro shell vibrating gyroscope have been introduced. The inherent vibrating mode based on electrostatic drive and capacitance detection has been discussed in theory.2. The basic principle of laser ablation has been introduced. The effect of beam parameters on ablation quality has been studied. The MC R has been fabricated and characterization of resonator of laser ablation has been analysed.3. The basic principle of silicon isotropic wet etching has been introduced. The silicon mold has been fabricated based on silicon isotropic wet etching. The cylinder shell resonator has been fabricated and characterization of resonator of isotropic wet etching has been analysed.4. The basic principle of glass-blown of micro shell vibrating gyroscope have been introduced. The round shell resonator and micro cylindrical shell resonator of micro shell vibrating gyroscope have been fabricated and characterization of resonator based on glass-blown has been analysed.