Research On The Structure Design And Processing Technology Of Wineglass Micro Shell Vibrating Gyroscope

The micro gyroscope of high quality has a great influence on the precise strike,inertial navigation and unmanned combat and other areas about national defence.The micro shell vibrating gyroscope originates in the microminiaturization of the macro shell vibrating gyroscope,which is hoped to inherit the advantage of the macro shell vibrating gyroscope.Numerous foreign research units have conducted researches on the micro shell vibrating gyroscope and some even have successfully fabricated the whole principle prototype.However,there is a huge gap between the domestic and abroad,showing in the research process and achievements that have been made.This article focuses on the design and fabrication of micro shell vibrating gyroscope and solves the critical problems including the architecture design,fabrication of micro vibrating resonators and resembling of the gyroscope.1.The basic structure and working principle of micro shell vibrating gyroscope was introduced.The wineglass structure of resonator and parallel structure of electrode were determined.The dynamics model of the gyroscope was established and the sizes of the structure were determined through modal simulations and harmonic response simulations by FEM.2.The fabrication principle of 3-D MEMS structure of curved surface was analyzed and the fabrication platform was established.Two fabricating methods were proposed and the fabricating traits of each other were analyzed.The 3-D MEMS structure of curved surface prepared for the micro shell vibrating gyroscope was successfully obtained.3.The micro shell vibrating resonators were obtained through laser ablating and surface metallization methods.The glass substrate was made and the whole gyroscope structure was achieved through assembling micro vibrating resonators with glass substrates.4.The micro shell vibrating resonators were measured,which demonstrates the good consistency between the resonators.The roughness is better than 7nm although there is some symmetric error.The capacitances and modal frequency of the gyroscope were measured.The frequency of driving mode is 22.113 kHz and the quality factor is 6080.2.The frequency of detection mode is about 22.216 kHz and the quality factor is 5819.8.The frequency split between the two modes is 103 Hz.