Research On Experiment And Detection Of LSPR Contact Lithography Prob

Compared with traditional optical lithography, the localized surface plasmon resonance(LSPR) contact lithography is a high-potential and new lithography, it has many characteristics, such as maskless, high image quality and resolution, etc.When research the localized surface plasmon resonance(LSPR) contacting optical lithography, both the domeistic and foreign researchers pay more attention on the structure of probe and less attention on the posture dectection of the probe. The posture of probe has a great influence on lithography quality, when the deflection angle of probe is greater than 100μrad in the process of lithography, it will lead to a lithography failure.The subject roots in the national key laboratory open fund "research of the experiment platform with nano-direct writing", according to the requirements of the subject, we need to build a system been used to detect prob posture and the research of experient. It should meet some detection ability, such as the control of initial contact volume, the adjustment of initial deflection angle, the detection of the maximum scanning deflection angle and the stability of scanning. In this paper, based the photoelectric detection technology, we design a detection system about microdisplacement and micro-angle base on the position sensitive detector(PSD), and we get the desired effect with the related experiment.Firstly, based the previous research of detection method, we designed a detection scheme about micro-displacement and micro-angle based on the beam deflection method, it could transform the research of probe posture to a detection of beam spot displacement. We choosed PSD as the photoelectric sensor, and He-Ne laser as the incident light source, and get the relationship about position coordinates of beam spot and the output voltage of PSD, it provided a theory basis for designing of system software. Based the detection shceme and index, we built the lithography experimental platform for researching of probe poeture.Secondly, we designed system software based on Labview software platform, it contains many functions, such as, data acquisition of beam spot position, the control of micro-displacement motion platform, the importing of different format images and the controling of exposure. We get the system calibration function based on calibration experiment and the analysis about theoretical model of system. Through theoretical and experimental method, we analysed the main influence factors of system eerror, and obtained the measurement resolution of displacement is 1.4μm, the measurement resolution of the Y-axis deflection angle is 8.5μrad, meet the detection requirements of originally designed.Last, we have done detection system experiment based on built of experiment platform, and achieved to control the probe initial contact volume limited 1 μm, to meet the the experiment requirments for the initial angle adjustment of probe. To make use of improved probe module, we can realize detection that the probe maximum deflection angle is not over 80μrad, and we also can do the deflection angle real-time detection in the scan process. The maximum full partial displacement of probe is 30μm that can meet lithography experiment requirments.