Development And Experimental Research Of Three-finger Microgripper Based On 3D-Packaging

The micro-gripper is a key component to achieve micro-operation and is a key link between micro-system and macro-system.With the gradual reduction of the size of the micro-operational object,the effect of the scale effect is gradually significant.Due to the influence of scale effect,the micro device easily adheres to the micro-gripper to perform the picking operation,but it is difficult to achieve stable release.To solve this problem,based on the analysis of the micro-members operation method,a three-finger MEMS micro-gripper with stable pick-up and reliable release of micro-components was developed.First of all,from the origin of the scale effect and its impact,this paper analyze the adhesion phenomenon.Aiming at the existence of scale effect,the method of reducing and overcoming the adhesive force was studied.A three-finger microgripper solution was proposed.Based on the establishment of microsphere operation mechanics model,the three-finger micro-gripper operation method was studied,which provided a theoretical basis for the development of the three-finger micro-gripper.In this dissertation,the design of a three-finger micro-gripper is carried out.Based on the analysis of the driving characteristics of the electro-thermal bending beam,the cold and hot beam type driving arm and the outer folding type electrothermal parallel beam driving arm are respectively designed as the planar driving of the micro-gripper section.The finite element method is applied to the temperature field analysis,displacement analysis and statics analysis of the actuator.The S-beam extension arm structure was designed to reduce the temperature of the end finger and reduce the holding force on the operating object.And the vertical micro-pressure finger portion was designed using finite element analysis.According to the structural characteristics of the micro-gripper,combined with the silicon micro-machining technology,the micro-gripper MEMS process was developed.On the basis of structural requirements of the three-finger micro-gripper,a micro-assembly process method was designed.Finally,the experimental system of a three-finger micro gripper was established.The performance of the electrothermal drive arm was tested and a micro-manipulator experimental study was performed on the micro gripper.Experiments show that the outer folding beam drive arm has good driving performance.The three-finger micro-gripper enables stable pickup and reliable release of micro-components.The expected effect was achieved.The development of a three-finger micro-gripper has made a useful attempt in micro-operation of MEMS,realized the miniaturization and integration of MEMS work tools ? Also,it plays an active role in promoting the development of MEMS micro-operation technology.