Design Of Wafer Handing Robot End-effector And Key Technique Research

Semiconductor manufacturing requires equipments which runs in the super clean room should have the character of super clean class, anti-static and high reliability. So, the robot working in the semiconductor manufacturing should have the ability of handling wafer and the character as said above. Moreover, silicon wafer handling robot is important in the semiconductor manufacturing. Thus, there is necessarility to analyze the robot for silicon wafer handling.The main research works are as follows:(1) The main structure of R-θ silicon wafer handling robot and the transformation of silicon wafer when it is clamped by robot end effector are analyzed. We confirm design direction, design way and detailed structure of robot end effector. The design of robot end effector which is satisfied to processing stations is accomplished. We improve the previous design and make it better.(2)Establish a dynamics model for silicon wafer handling robot and get all the parameters expressions by calculating and analyzing the dynamics model. The timing belts are equivalent to torsion spring. It is a vibration model of robot system. After calculating and analyzing for the vibration model, establish vibration-control model. By simulating and analyzing the vibration-control model, get control algorithm about restraining the vibration of robot system.(3)Set robot system’s error parameters and establish mathematical model. Test and verify the feasibility of calibration arithmetic by calculating and analyzing. Then redact procedure about calibration experiment and set up experiment system. Accomplish the calibration experiment of robot system by CCD. Through the above-mentioned word, we test the rationality of robot’s process-running precision which can ensure silicon wafer arrive the correct position.(4)Identify the coordinate systems of silicon wafer handling robot and silicon wafer aligner. It is very important to assist calibration of silicon wafer aligner and ensure silicon wafer arrive the correct position. Redact procedure about associated operation between silicon wafer handling robot and silicon wafer aligner, and recognition algorithm is accomplished too. Through the above-mentioned word, the silicon wafers’positional precision is improved greatly.