Research On Dynamical Characteristics And Structural Optimization For The Wafer Handling Robot

Integrated Circuits (IC) equipment manufacturing is the typical representative of the high-tech equipment industry, wafer handling robot is the key equipment which is responsible for transporting and locating, and its performance has a direct impact on the wafer production efficiency and manufacturing quality. In allusion to the high-precision, high cleanliness and high reliability requirements of the wafer handling robot, to make a study on the dynamical characteristics simulation and experiment, simultaneously, to make a structural optimization has a great significance in depth study for the wafer handling robot.Firstly, the paper introduces the development and research status on wafer handling robot at home and abroad, following with an overview of the kinematics, dynamics, structural optimization design and evaluation of the robot arm. Then the paper points out that it is necessary to make the research on dynamical characteristics and structural optimization for the wafer handling robot.Secondly, according to the basic theory of robot kinematics and dynamics, respectively, the paper shows the robot kinematics equations and Lagrange equation of the radial linear stretching motion, to provide a theoretical basis for the follow-up study.Then, the paper establishes virtual prototyping simulation model of the wafer handling robot and makes a study on the robot kinematics and dynamics simulation of the radial linear stretching motion under ADAMS environment, and gets a series of important simulation results of the big arm, the small arm and the end effector, such as velocity curve, acceleration curve, angular velocity curve. The results have validated the theoretical analysis of the robot kinematics and dynamics.Subsequently, according to the theory of modal analysis, the paper carries on a finite element modal analysis for the robot arm by ANSYS, and builds kinetic experimental platform to proceed the experimental modal analysis of the robot arm, then processed and analyzes the experimental data based on the admittance circle modal identification method by MATLAB. The results show that the dynamics characteristics of robotic arms require to be improved and the structure needs to be optimized.Eventually, according to the dynamic analysis, simulation results and experimental modal analysis data of the wafer handling robot arm, the paper carries out the structural optimization design for the end effector, and then the end effector that meets the strength and stiffness requirements is designed based on the design optimization results. Finally, the paper proves the correctness of optimization which can improves the performance of the robot arm.