Design And Implementation Of The Liquid Floating Rotor Type Micromachined Gyroscope Detection Electrodes Structure

Suspended rotor micromachined gyroscopes without mechanical support as a newgeneration of high precision, high stability of the micro inertial device play anirreplaceable role in aerospace, weapon guidance, civil and other fields. The differentialcapacitance which can be detected by displacement detection directly affect theprecision of the gyroscope. The finite element simulation and experiments are employedto discover how the structure of electrodes affects the magnitude of differentialcapacitance.This article first gives a simple overview for all kinds of suspended rotormicromachined gyroscopes and detaily introduces the structure, working principle,displacement detection method of the gyroscope involved. After basic understanding ofthe whole system, the differential capacitance generated by the rotor moving along the Zaxial and rotating around the X, Y axis has been theoretically calculated. And thedifferential capacitance generated by the radial electrodes after parallel movement of therotor along the X, Y axis has been theoretically calculated. After the theoretical analysis,the simulation of the differential capacitance generated by the rotor moving differentdistances along the Z axis and rotating around the X, Y axis in three different structures：four, six, eight axial electrodes is implemented by using the finite element simulationsoftware named Comsol Multiphysics and express the relationship between rotordisplacement changes and the corresponding differential capacitance value. From thesimulation result, eight couples of axial electrodes are proper to detect the movementthat the stator rotates around the X or Y axis. Three couples of radial electrodes areproper to detect the movement that the stator moves along the X or Y axis. Maximumsimulate the real gyroscope mechanism structure and ensure the rotor to rotate freely byuse of the test platform built by organic glass materials, electrodes produced by PCBplates. Flexibly apply circular funtions to set the rotation angle of the gyroscope stator.