Temperature Reserarch Of The Liquid Floating Rotor Type Micromachined Gyroscope

Gyroscope is a key element of inertial sensor in the navigation field. It canmeasure the position of the carrier, heading and attitude. We propose a highaccuracy liquid floating rotor type gyroscope, which make use of the stablebuoyancy of liquid to supporting the rotor of gyro. Temperature is a major factoraffecting the stability and sensitivity of gyroscope. This topic is mainly to studythe temperature of gyroscope and the temperature effect of gyro using themethod of software simulation and experimental verification.This paper draws a geometric model of gyroscope, which is based on thestructure of the six phase twelve electrode. We analyses heat source and coolingmode of the gyroscope system, and constructed the simulation model of gyrotemperature by using multi-physics simulation software COMSOL. The coiltemperature up to86℃; the rotor temperature about65℃. The heat generated inrotor and the induction current is small, it comes mainly from the coil.In order to verify the accuracy of simulation model, we use the infraredFLAR-315to measure the temperature of gyro. Test results and simulationresults are almost same, but simulation results are higher than test results. Thehighest temperature of the gyroscope is about81.3℃on the coils. The rotortemperature is about63℃. We modified the simulation model according themeasurement results, and the correct result is obtained at last.We analyzed the influence of the gyro, according the temperature simulationresults and the powerful processing function, such as the couple of thermal andelectricity, the suspension liquid, oxidation and deformation. The surface superhydrophobic structure influences the temperature.