Research On Integrated Fabrication Process Of Bionic Array Polarization Navigation Sensors

With the increasing demand for navigation technology in military and civil fields,the autonomous navigation of carriers have achieved rapid development.Most autonomous navigation systems involve the use of Global Positioning System(GPS)and inertial measurement units.When autonomous navigation systems deal with highly complex environments,the magnetic field is often unpredictable and the accuracy of GPS is sometimes greatly degraded by the surrounding environment.In such cases,bionic methods can provide some alternative solutions.In this paper,a study on the integrated fabrication process of bionic array polarization navigation sensors is carried out,focusing on two key issues,namely,the conformal fabrication process of metal nanograting arrays(MNA)and the millimeter-micron-nanometer cross-scale integration process,as follows.First,the conformal fabrication process of MNA is investigated.A vertical demolding method of nanoimprint lithography(NIL)is proposed,and experiments on the fabrication of multi-directional nanograting arrays are carried out.The results show that the NIL vertical demolding device can effectively achieve high fidelity replication of multi-directional,high aspect ratio nanostructures.Then,based on NIL process with the vertical demolding device,the integration process of MNA and CMOS sensors was studied,and an array polarization navigation sensor was developed with an angular accuracy of ±0.5°.The integration process is suitable for the integrated fabrication of packaged devices like CMOS sensors as substrates with low cost,and can be used for pre-experimental verification of research exploration.Second,a multi-scale integration process across millimeter,micron,and nanometer scales is investigated.By combining the advantages of NIL and photolithography,a nanoimprint-photolithography(NIPL)composite process is proposed to realize the "one-step" fabrication of cross-scale micro and nano structures.A variant template for the NIPL process is developed,which is simple,micron-scale tunable,and highly adaptable and scalable for different applications.Finally,based on the NIPL process,the integration process of MNA and pixel array chip is studied,and the array integrated polarization navigation sensor is developed,with the angular accuracy of ±0.2° and the overall size of 4cm×4cm.The integration process has strong adaptability to uneven substrates and strong flexibility to the requirements of integrated devices,and the process can be used as an alternative to the tape-out process when mature.