Study Of Flexible Fabric Pressure Sensors Based On Elliptical Array Microstructures

With the rapid development of Io T technology and flexible electronics,the depth and breadth of Researchers’acquisition of the external environment continues to increase.Flexible sensing technology has already overturned scholars’perceptions of the form and function of traditional rigid sensor devices.As an important class of information acquisition devices,flexible pressure sensors are widely used in fields such as bionic electronic skin and wearable devices,bringing great changes in signal collection in social life.Although the research on high-sensitivity flexible pressure sensors has been intensified,there are problems of electrode breakage,conductive material shedding,poor adhesion between flexible substrates,and high fabrication costs when dealing with different forms of pressure.This thesis presents an in-depth study on the problems of flexible pressure sensors in terms of theoretical models,fabrication processes and application environments,including transferring bionic microstructures,preparing flexible fabric electrodes,calibrating performance metrics and exploring application scenarios.A flexible fabric pressure sensor based on a bionic tilt-like elliptical microstructure has been designed.Its main components are the upper and lower parallel electrode plates and the intermediate dielectric layer.Flexible substrates and encapsulation materials are made from skin-friendly polydimethylsiloxane（PDMS）polymers.The rose petal surface microstructure is selected and flexibly transferred by a MEMS process and a PDMS soft lithography process to give the dielectric layer a tilted elliptical microstructure on the upper and lower surfaces.Fully flexible electrodes were prepared using ribbed fabrics as conductive units embedded in PDMS substrates.Microstructured dielectric layers and fabric electrodes based on polydimethylsiloxane（PDMS）silicone compounds were fabricated,encapsulated,and tested for sensitivity,transient response characteristics and stability.Linear fitting in multiple segments over a detection range of 0-80 k Pa with a sensitivity of up to 0.145 k Pa^-1（low pressure<1 k Pa）,which is 7 times more sensitive than a PDMS flat panel sensor of the same thickness.Response and recovery times of13 ms enable accurate acquisition of transient signals and capture of dynamic signals of stepped pressure loads（with an upper limit of 105 k Pa）.After more than 7,000 cycles of cyclic shock operation,the sensor demonstrates excellent repeatability and good stability.The sensor combines high sensitivity,low production costs and high stability to maintain good working conditions under different forms of environmental pressure.The application of this sensor to uneven rigid surfaces and complex human surfaces,such as single and double-click operation recognition and knuckle movement monitoring,is explored.Accurate identification of object quality and temperature is achieved by setting different grasping scenarios.The sensor has potential applications in the fields of health detection,motion monitoring and human-computer interaction control,providing new ideas for flexible sensing into daily life.