Research On The Uniformization Distribution Of QCM Sensor Mass Sensitivity Based On Finite Element Analysis

Quartz Crystal Microbalance(QCM)is a kind of high precision sensor which is widely used in many specific fields nowadays,however,due to the uneven mass sensitivity distribution on the whole sensor surface,it will lead to the bias of the sensor for multiple measurements of one detection object,and the repeatability of QCM test results is reduced.To address this problem,improving the uniformity of mass sensitivity distribution on the surface of QCM sensors has become one of the research hotspots in recent years.The main contributions of this paper are as follows(1)Improving the mass sensitivity by designing the electrode structure of QCMs to achieve the universality of QCMs in applications is a relatively novel research direction at present.In this paper,the piezoelectric intrinsic equation of quartz crystal is used as an entry point to analyze the vibrations of different regions of QCM,and the two factors of energy trapping effect and sensitivity are balanced in the structural design process of QCM.(2)The mass sensitivity function of the QCM is obtained based on the solution of the vibration displacement function of the mass point,which fundamentally reveals the intrinsic mass sensitivity principle of the QCM.Based on the mass sensitivity theory,the mass sensitivity of QCM with different electrode structures is analyzed and calculated to reveal the influence of different electrode structures on the mass sensitivity of QCM,and the uniformity of mass sensitivity of QCM with double-ring electrodes is demonstrated by analyzing the mass sensitivity distribution of QCM with different electrode structures.(3)For the QCM with double-ring electrode structure,the design of its double-ring electrode parameters is improved,and the variation law of mass sensitivity and its electrode parameters is explored based on the guidance of theoretical modeling principles,and the electrode parameters of the double-ring QCM are optimized based on the finite element method(FEA).(4)For the problem of non-uniform vibration of circular ring electrode x1 and x3 axes,the design of elliptical ring electrode structure is proposed,and the influence of elliptical electrode parameters on mass sensitivity distribution in different directions is analyzed by theoretical calculation and FEA simulation,revealing that the elliptical ring electrode structure has the characteristic of better uniformity of mass sensitivity distribution.