Research On Temperature Drift Error Compensation Technology Of MEMS Accelerometer Based On Microscale Analysis Method

Micro inertial navigation system(MINS)is an important guarantee for the carrier to navigate safely and smoothly in extreme environment.Complex environmental conditions require MINS to have high reliability,stability and precision.However,as an important component of MINS,the comb structure of MEMS accelerometer is made of silicon-based materials with strong temperature dependence,which makes MEMS accelerometer sensitive to ambient temperature,and then stimulates the output temperature drift error of MEMS accelerometer,which leads to the decrease of accuracy,reliability,and stability of MINS.Therefore,it is of great significance to study the temperature drift compensation technology of MEMS accelerometer for eliminating the dependence of MEMS accelerometer on ambient temperature,improving the stability of MEMS accelerometer,and improving the navigation accuracy of MINS.To solve the problem that the traditional MEMS accelerometer temperature drift compensation technology can’t accurately trace the MEMS accelerometer temperature drift error and its error estimation is inaccurate,the MEMS accelerometer temperature drift compensation technology based on microscale analysis method is proposed,which eliminates the dependence of MEMS accelerometer on the ambient temperature and ensures that MEMS can output micro inertial information accurately,in real time,stably and reliably in complex environment.The main research contents are as follows:To solve the problem of accurate traceability of temperature drift error,the temperature drift error traceability technology is theoretically analyzed based on micro-scale analysis method.Through more accurate analysis and research on the physical mechanism of silicon-based materials,a more accurate mathematical model of thermal expansion is put forward,and the thermal stress deformation of comb structure is simulated based on finite element analysis method to ensure the feasibility of constructing the temperature drift error estimation model.Based on the comparison between mathematical formula and thermal expansion model,the deformation of three-dimensional comb structure under different conditions is studied,so that the influencing factors of temperature drift error are decoupled,and an accurate and comprehensive traceability model of temperature drift error is constructed.To solve the problem that the traditional model based on BP-ANN is not accurate in estimating the temperature drift error,through the simulation analysis of BP-ANN,it is clear that the method to improve the compensation accuracy is to solve the local optimum problem in BP-ANN and to combine GA algorithm to optimize BP-ANN.In the research,it is found that GA introduces the probabilized disorder problem in the process of solving the problems existing in BP.Therefore,GA+PSO compound algorithm is used to optimize BP-ANN,and the simulation results show that the compound algorithm can solve the local optimum and probabilized disorder problems,so as to complete the temperature drift error estimation model based on GA+PSO composite algorithm.The temperature rise and fall experiment under the condition of static base is designed.Taking ADXL355 sensor as an example,the performance test is carried out,and the temperature drift compensation performance evaluation experiment is designed based on the accurate parameter identification method.The experimental results show that compared with the traditional technology based on BP-ANN,the optimization degree of temperature drift compensation technology with temperature drift error traceability model and temperature drift error estimation model is increased by 16.1%.Finally,the iterative effect evaluation results show that compared with the temperature drift compensation technology based on GA+PSO optimization,the temperature drift compensation technology based on GA optimization not only ensures the temperature drift effect of MEMS accelerometer,but also achieves 40%performance improvement in real-time operation.These results show that the temperature drift compensation technology of MEMS accelerometer based on microscale analysis method has a good compensation effect on the temperature drift error of MEMS accelerometer.In addition,the traceability model and estimation model of MEMS accelerometer temperature drift compensation technology based on microscale analysis method are a general technology,which is also suitable for the research of temperature drift compensation technology of other MEMS devices with comb structure.