| Surface science is one of the more promising disciplines in modern times,covering the fields of physics,chemistry,semiconductor science,and materials science.The current development of vacuum and nanotechnology has promoted the development of surface science and the development of surface analysis technology,which makes full use of various surface analysis instruments to explore the surface and thus open the"door"to the world of atoms and molecules.As an important part of surface analysis and nanotechnology devices,ion guns are the main devices to realize surface ion sputtering.For surface bombardment cleaning,surface sputtering etching or depth profiling of samples,a domestic cold cathode Penning ion gun was designed.This ion gun has the advantages of filamentless structure,long working life,simple and compact structure,easy operation and uniform ion beam distribution.Translated with www.Deep L.com/Translator（free version）In this paper,the initial model of the penning ion gun discharge chamber is designed,and the important parameters are optimized by the plasma module of COMSOL.Through the results of simulation analysis to find out the defects in the design,for the structural defects of continuous optimization,until the satisfactory model structure and performance parameters.Secondly,to ensure that all the parameters are in the best situation,the mechanical structure of the Penning ion gun was designed,including the main structure of magnetic steel mechanism components,housing components,discharge chamber components and leading mechanism components.Finally,in order to verify the reliability and effectiveness of the designed cold cathode Penning ion gun,a set of experimental equipment was built to test its performance.The corresponding relationship between ion beam current and acceleration voltage,ion beam current and working pressure,and the size of ion beam spot under certain parameters were tested.According to the experimental analysis,the Panning ion gun can effectively realize the functions of ion generation,extraction and focusing,and the ion energy can be continuously adjusted from 0 to 5ke V.When the working pressure is 1.3×10-2Pa,the working distance is80mm,and the ion acceleration voltage is 2.5k V,the ion beam value is 33μA,and the beam spot diameter is 12mm.The performance parameters of the cold cathode Penning ion gun are up to the design standard,and it can be used for surface cleaning,surface sputtering etching and depth profile analysis of samples.The successful development of the Panning ion gun not only improves the technical level and comprehensive application in the field of small ion gun in China,but also promotes the development in the field of surface analysis in China. |
