Research On Static Performance And Experiment Of Aerostatic Thrust Bearing With Annular Multi-hole Restrictor

Aerostatic thrust bearings are widely used in aerospace,semiconductor chip manufacturing and other industries,because of their high precision,frictionless,pollution-free and high and low temperature resistance.With the advancement of ultra-precision processing technology,the overall precision manufacturing industry has put forward updated and more demanding requirements for the load-bearing capacity,stiffness,and stability of aerostatic thrust bearings.Especially for improving the bearing capacity of aerostatic thrust bearings,it has become the focus of researchers addressing cutting-edge research problems.In this thesis,the research objective is to increase the load-bearing capacity and stiffness of aerostatic thrust bearings,the research work on the aerostatic thrust bearing with annular multi-hole restrictor was carried out.Firstly,a new type of aerostatic thrust bearing with annular multi-hole restrictor was proposed on the basis of relevant literature at home and abroad,combined with the principles of fluid lubrication.The theoretical foundation was built by constructing the physical model,deriving the control equations,establishing the stiffness calculation expressions and elaborating the numerical simulation methods.Secondly,the finite volume method was used to modelling the three-dimensional values of aerostatic thrust bearing with annular multi-hole restrictor.The gas basin of the aerostatic thrust bearing was meshed,by comparison the numerical simulation results of the aerostatic thrust bearing with different design parameters,the main factors affecting its load static performance are investigated.Thirdly,the physical model of the symmetry at the restrictor of the aerostatic thrust bearing with annular multi-hole restrictor was then pre-processed and numerical calculations are carried out for the gas film basin.The complex flow field in the gas film flow field of the aerostatic thrust bearing was studied and the factors influencing on distribution of pressure,velocity and temperature in the gas film flow field are investigated.Finally,the static performance test platform of the aerostatic thrust bearing with annular multi-hole restrictor was built,and the static performance experiment was carried out on the manufactured aerostatic thrust bearing test-pieces.The experimental test results and numerical simulation results of the static load performance of the aerostatic thrust bearing are analyzed and contrasted,and the influences of the errors are investigated.Through the research on the physical model,working principle,static pressure characteristics,gas film flow field and static performance test experiments of the aerostatic thrust bearing with the annular multi-hole restrictor in this thesis,the results shown that the aerostatic thrust bearing with annular multi-hole restrictor has better load static performance and smoother film flow field,the experimental test values agree well with the numerical simulation results.The research in this thesis will help to enrich and expand the design methods and research methods of aerostatic thrust bearings,and laying an important theoretical and technical foundation for further accelerating the application of aerostatic thrust bearings in industrial production fields.