Design Of Multi-channel Ultrasonic Transceiver Integrated Circuit For CMUT

Early accurate diagnosis and continuous monitoring of breast tissue lesions are helpful to improve the cure rate of breast diseases.With the continuous research and development of contemporary medical imaging technology,medical ultrasound imaging technology stands out because of its unique advantages such as safety,non-invasive and real-time diagnosis.Due to the limitations of process technology and manufacturing cost,it is difficult for piezoelectric transducers to produce high-density integrated and consistent arrays,so there is an urgent need to carry out research on breast ultrasound imaging system based on new ultrasonic transducers.CMUT which based on silicon micromachined technology has many performance advantages,such as easy to match with human impedance,easy to integrate array,wide band and so on.It has gradually become a key part of medical ultrasonic imaging system.In order to meet the digital requirements of early monitoring and non-invasive detection of breast cancer,the weak signal detection circuit of CMUT is designed to solve the problem that the output current signal of CMUT is relatively weak.The integrated circuit of multi-channel ultrasonic transceiver is designed to realize the construction of ultrasonic imaging system based on CMUT.The structure design,watertight package,circuit system construction and underwater application test of CMUT are described in detail,which provides technical support for the medical application of CMUT ultrasonic imaging system.In this paper,by building the test platform of CMUT,the working characteristics of CMUT are studied deeply,and the C-V characteristic,transmission voltage response level,reception sensitivity and bandwidth parameters of CMUT are tested and calibrated.The performance test of multi-channel ultrasonic transceiver integrated circuit is completed,and the reflection test is carried out by combining CMUT single element device and CMUT linear array.Finally,the integration of driving,echo signal receiving and data acquisition of CMUT is realized.The signal quality is good,which reflects that CMUT has good reflection ability,and the feasibility of medical ultrasonic imaging system based on CMUT is verified.